When two synchronized laser beams illuminate the inner surface of bulk lithium niobate crystals with magnesium doping (5%/mol MgO:LiNbO3) under the condition of total reflection, semi-degenerate four-wave mixing (FWM) is generated. On this basis, a more sophisticated frequency conversion process on the interface of nonlinear crystal has been researched. The generation mechanism of FWM is associated with the fundamental waves reflected on the inner surface of the nonlinear crystal. Analysis of the phase-matching mechanism confirms that the FWM is radiated by the third-order nonlinear polarized waves, which are stimulated by the third-order nonlinear susceptibility coefficient of the nonlinear crystal. Theoretically calculated and experimentally measured corresponding data have been presented in this article. These results are expected to provide new inspiration for further experimental and theoretical research on frequency conversion in nonlinear crystals.

The emerging fields of silicon (Si) photonic micro–electromechanical systems (MEMS) and optomechanics enable a wide range of novel high-performance photonic devices with ultra-low power consumption, such as integrated optical MEMS phase shifters, tunable couplers, switches, and optomechanical resonators. In contrast to conventional SiO2-clad Si photonics, photonic MEMS and optomechanics have suspended and movable parts that need to be protected from environmental influence and contamination during operation. Wafer-level hermetic sealing can be a cost-efficient solution, but Si photonic MEMS that are hermetically sealed inside cavities with optical and electrical feedthroughs have not been demonstrated to date, to our knowledge. Here, we demonstrate wafer-level vacuum sealing of Si photonic MEMS inside cavities with ultra-thin caps featuring optical and electrical feedthroughs that connect the photonic MEMS on the inside to optical grating couplers and electrical bond pads on the outside. We used Si photonic MEMS devices built on foundry wafers from the iSiPP50G Si photonics platform of IMEC, Belgium. Vacuum confinement inside the sealed cavities was confirmed by an observed increase of the cutoff frequency of the electro-mechanical response of the encapsulated photonic MEMS phase shifters, due to reduction of air damping. The sealing caps are extremely thin, have a small footprint, and are compatible with subsequent flip-chip bonding onto interposers or printed circuit boards. Thus, our approach for sealing of integrated Si photonic MEMS clears a significant hurdle for their application in high-performance Si photonic circuits.

In this Letter, a new method is presented to calculate the interactive length between the fundamental wave and second harmonic generation (SHG) for the configuration of total internal reflection on the inner surface of a nonlinear crystal. Three independent experiments are designed to measure the bandwidths of this second harmonic wave. The theoretical expression of the intensity of SHG is obtained through a nonlinear coupled wave equation. The interactive length of this phase-matched SHG can be calculated mathematically by utilizing the measured bandwidths and the intensity equation. There is no existing method to obtain the interactive length either from theoretical calculations or by experimental measurement. This method can be applied to estimate the extremely short interactive volume in nonlinear processes.